法国KLOE公司在光刻方面有着丰富的经验，其研发的UV- KUB系列光刻机是一种基于UV LED的曝光机系统，结构紧凑，可以直接放置在实验台上，能够处理zui大直径4英寸的晶圆，兼容硬接触（接触式 ...
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